Monoclinic B-phase erbium sesquioxide (Er2O3) thin films by filtered cathodic arc deposition
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چکیده
منابع مشابه
Deposition of permalloy films by filtered cathodic vacuum arc
The filtered cathodic vacuum arc technique was employed to deposit magnetic films such as FeNi on silicon substrate. Using the normal cathode design, tetrahedral amorphous carbon and metals films can be deposited. If a magnetic target is used, the arc spot always preferably moves to the edge of the target and then extinguishes. Therefore, the arc is not stable and no film can be deposited. A ca...
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Amorphous carbon thin films with a wide range of sp fraction from 20 to 90% grown by filtered cathodic arc deposition have been examined by ultraviolet (UV) at 325 nm and visible Raman spectroscopy at 457 nm excitation wavelength. The comprehensive study of behaviour of G, D and T band with sp/sp content has been carried out. The upwards shift of the G peak with sp content was observed for both...
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A dual-cathode arc plasma source was combined with a computer-controlled bias amplifier to synchronize substrate bias with the pulsed production of plasma. In this way, bias can be applied in a material-selective way. The principle has been applied to the synthesis of metal-doped diamondlike carbon films, where the bias was applied and adjusted when the carbon plasma was condensing and the subs...
متن کاملStructure of ultra-thin diamond-like carbon films grown with filtered cathodic arc on Si(001).
The structure of 3 nm and 15 nm diamond-like carbon films, grown on Si(001) by filtered cathodic arc, was studied by angle-resolved X-ray photoelectron spectroscopy (ARXPS) and transmission electron microscopy (TEM). The ARXPS data was deconvolved by employing simultaneous-fitting, which allowed for a clear deconvolution of the Si 2p and C 1s spectra into their different chemical contributions....
متن کاملEffects of substrate bias and growth temperature on properties of aluminium oxide thin films by using filtered cathodic vacuum arc
Two sets of aluminium oxide thin films were deposited using off-plane filtered cathodic vacuum arc (FCVA) at the working pressure of 6 10 4 Torr under various substrate biases ( 60 to 140 V) and substrate temperatures (120–600 8C), respectively. Optical and mechanical properties, such as refractive index, residual stress, hardness and Young’s modulus, of the films were investigated. It has been...
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ژورنال
عنوان ژورنال: Scripta Materialia
سال: 2009
ISSN: 1359-6462
DOI: 10.1016/j.scriptamat.2009.06.031